摘要
文中叙述了以气体分析质谱计作指示器，动态法测量渗透率的原理，实验装置与测量结果。结果表明质谱计动态法所得结果与许多基本文献提供的数据是一致的。此外文中也讨论了这方法的优缺点。
In this paper, it is described the principle of penetration rate measured by dynamic method, experiment set-up and the measured result, the gas mass spectrometer was taken as indicator. It shows that the result obtained by the dynamic method of mass spectrometer is uniform with the datum given by many references. Otherwise the advantages and defects of the method are also discussed.
出处
《真空》
CAS
北大核心
1989年第4期36-38,53,共4页
Vacuum
