摘要
本文主要介绍了全金属超高真空规管比对系统。该系统具有大容积、全金属等优点。图１展示了系统装置：该系统装置的真空校准室容积为１９８升，规管及连接管道的总容积为 ４．２升，两者之比为 ４７．２倍，满足了 ＩＳＯ／ＤＩＳ ３５６８标准。该系统的极限真 空为 １．７×１０－９Ｐａ，校准范围为 １０－２～１０－８Ｐａ． ９只规管均匀地分布在校准室容器上 （图２），以便减少规管间的相互影响．讨论了影响压强稳定度和均匀性的因素（图３）。 例举了比对实验的实测结果（表 ２）。此系统满足了北京正负电子对撞机（ＢＥＰＣ）贮 存环所用超高真空规管校准的需要，同时，也为其它用户提供良好的服务。
In this paper, mainly introduce ultra high vacuum gauge intercomparison system.lt has the advantages: volume is large, made of all metal material. The system equipment is shown on Fig. 1. The calibration vessel has a volume of 192 L, gauges and connective channel have a volume of 4.2 L.The rate between the two is about 47.2 times and meets the standard ISO/DIS 3568. it's limit pressure is 1.7×10-8Pa, calibration range is from 10-2 to 10-8Pa. 9 gauges are well distributed in the calibration vessel (Fig.2), in order to decrease interference among gauges. The factors affecting the pressure stability and uniforming are discussed. The results of intercomparison are listed in table 2. The system meets the requirement of ultra vacuum gauge calibration in the Beijing Electron Positron Collider Project (BEPC) Storage Ring, otherwise it can also provide good service for other users.
出处
《真空》
CAS
北大核心
1989年第2期40-45,共6页
Vacuum
