摘要
三分量光弹波导MZ干涉型集成加速度传感器的研究,为高频高精度地震勘探提供集成化的高精度传感器.利用光弹原理,分析了光弹效应检测任意方向加速度的原理.在X切Y传LiNbO3晶体上,设计制作了光波导双MZ干涉仪及各集成器件:波导相位调制器、波导偏振器.三分量光弹波导MZ干涉型集成加速度传感器测试表明:该传感器动态范围宽、线性性好.主要参数为:相位灵敏度达1.81×10-4Rad/m·s-2;工作频带3～1506(Hz).
In order to provide a high resolution wide band geophone for three-dimensional seismic geophone, the three-component hybrid-integrated optical acceleration seismic geophone is designed. Analysing the photoelastic effect of LiNbO3 waveguide applied arbitrary-direction acceleration. The MachZehnder interferometer is realized by symmetrical Y-branching waveguide,waveguide phase modulator and two waveguide polarizers, which are monolithically integrated on an X-cut, Y-propagating LiNbO3 substrate. The results reveal that the accelerometer has wide band and good linearity. The main design parameters of the geophone system is as following, natural frequency.4300 Hz;phase detection sensitivity △φ/a. 1.81× 10^-4 rad/m·s^-2;work frequency range： 3～1506 Hz.
出处
《光子学报》
EI
CAS
CSCD
北大核心
2005年第7期1062-1065,共4页
Acta Photonica Sinica
