摘要
该器件采用电晕预电离技木,只要调换工作气体和相应的反射镜,就可以分别作为 TEA CO_2激光器、N_2激光器和 XeCl 准分子激光器。文中对器件结构和工作特性进行了讨论。
The corona pre-ionized technique has been applied to TE multifunction gas laser.If gas in the laser and reflecting mirrors are changed,the device can become TEA CO_2 laser,N_2laser or Xecl excimer laser.The structure and characteristics of the laser have been described inthis paper.
出处
《应用激光》
CSCD
北大核心
1989年第4期167-169,166,共4页
Applied Laser
