摘要
设计了一种小型激光等离子体软Ｘ线－真空紫外光源。该光源辐射强度高、波段覆盖宽、光谱连续平滑，其重复性、稳定性均优于±４．５％。适合在非同步辐射的一般实验室中使用。在亚微米光刻、软Ｘ射线显微术、真空紫外光谱学、薄膜光学常数测试等研究及应用技术领域具有广泛的实用价值。本文探讨了光源的辐射机制，给出了较理想的光谱测试结果。
A laser-produced plasma soft X-ray-VUV source generated with low energy laser system has been designed. It offers several advantages, such as high intensity, extended and smooth continuum spectrum. its reproducibility and stability is found to be better than ±4. 5%. It is best suited to use in the general laboratories which do not require the specific properties of the synchrotron radiation. It has widespread practical value in the field of research and technology of submicron lithography, Soft X-ray rnicroscophy, VUV spectroscophy and thin film optical constant measurements etc. This paper mainly describes the radiation mechanism of the source.The rather ideal spectral measurement results have been offered.
出处
《光谱学与光谱分析》
SCIE
EI
CAS
CSCD
北大核心
1995年第4期9-16,共8页
Spectroscopy and Spectral Analysis
基金
国家开放实验室基金
关键词
激光等离子体
软X线
真空紫外
辐射机制
Laser-produced plasma, Soft X-ray-Vacuum Ultraviolet, Continuum spectrum
