摘要
提出了用石英晶体谐振器构成的超精密位移或压力传感器的原理．由于石英晶体振荡器有超常的精度和稳定性，因而组成的位移或压力传感器也具有极高的精度和线性。还引入双晶振的差频原理，既消除了温度影响，又提高了频率变化范围，提高了测量分辨率。
This paper presents the principle of precision displacement or for sensing of quartz crystal resonator. Because the quartz crystal resonator has supernormal precision and stablity, the displacement and force sensors have high precision and linearlity. The paper also reports on the principle of differential frequency of dual crystal resonators, not only it eliminates temperature effect, but also it enhances frequent change and measurement resolution.
出处
《传感器技术》
CSCD
1995年第3期35-38,共4页
Journal of Transducer Technology
基金
国家自然科学基金
关键词
石英晶振
位移传感器
精密测试
Quartz crystal resonator
Displacement sensor
Precision test
