摘要
本文简介了 Vickels 公司 M41型 Z 轴检测显微镜的工作原理和测量方法,并测量了实验片。测量结果表明:此测量方法能够把条深控制在10%的公差范围内。
The operation principle and measurement method of Vickers M41 model Z-axis check microscore are descrbed,and the experimental,samplc was mca sured.The measurement result has indicated that this method is able Io contol the deepness of optical-cut in a tolerance of 10%.
出处
《半导体光电》
CAS
CSCD
北大核心
1989年第3期89-92,共4页
Semiconductor Optoelectronics
