摘要
提出一种激光扫描测量厚/宽度的新方法,系统由准直激光源、差动扫描转镜、接收物镜、光电接收器和智能仪表组成。准直光源发出的光束经差动扫描转镜形成差动扫描,扫描光束被待测工件反(散)射后,由接收物镜汇聚至光电接收元件,测量反(散)射光在待测工件上的持续时间,由特定公式计算出工件厚/宽度。理论分析和实验结果表明,测量结果与工件至系统之间距离无直接关系,工作稳定性好,实验最大测量误差不大于扫描激光束束腰半径。
A thickness and width measuring technique is advanced. The system is consisted of alignment laser source, differential scanning mirrors, accepting objective, photoelectric device as well as intelligent meter. Differential scanning method can be realized when laser beam is deflected by the differential scanning mirrors, light reflected (or scatted) by work piece reaches to photo-electro devices and the continue reflected (or scatted)time can be measured, the thickness and width is computed by a special formula. Analyses and experiments shows that measuring results is correlative with the distance between system and work piece, so system is stably, maximum measuring errors can be limited within half of the FWHM.
出处
《应用激光》
CSCD
北大核心
2005年第3期176-178,175,共4页
Applied Laser
