摘要
文章通过对椭偏仪测量原理的分析给出了四区平均消光状态下的计算公式,利用该公式计算在一个周期内的薄膜厚度和折射率结果较好;同时给出了膜厚大于一个周期时的计算方法。
From analyzed measurement elliptical polarization principle the method to calculate average extinction in four areas was presented in this paper. The method calculated thin film thickness and refractive index had a good coherence in one period. The method also can measure thin film thickness over one period.
出处
《云南师范大学学报（自然科学版）》
2005年第4期24-27,共4页
Journal of Yunnan Normal University:Natural Sciences Edition
基金
国家"863"资助项目(2001AA513040).
关键词
椭圆偏振测量
薄膜厚度
折射率
Elliptical polarization measurement
film material thickness
refractive index
