摘要
根据谐振腔理论,证明圆柱反应腔内的主模为TM01p模,并在圆柱坐标下采用FD-TD数值方法求解圆柱形反应腔中的场分布情况,改善和提高微波等离子体反应装置的激励性能.等离子体实际分布与场分布的预测结果基本吻合.
According to resonant theory, it was justified that TM01p was the main mode in a cylindrical cavity . Finite difference time domain(FD-TD)in cylindrical coordinate system was used to simulate the electromagnetic field distributions inside the reactor to improve performances. The experimental results are in good agreement with the theoretical predictions.
出处
《华东师范大学学报（自然科学版）》
CAS
CSCD
北大核心
2005年第2期52-57,共6页
Journal of East China Normal University(Natural Science)
基金
国家自然科学基金(19971027
10271048)
