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同心三反射镜光学系统研究 被引量:11

Research of the concentric three-reflection optical system
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摘要 介绍了由同心折、反射面组成的光学系统的一般特性,揭示了如果入射光束与出射光束平行,那么系统对空间任一点成几何理想像。讨论了同心光学系统实物成实像的条件和Offner系统的环视场,给出了Offner系统的计算公式。 The general properties of optical systems consisting of a set of concentric refracting or reflecting surfaces are introduced. It is shown that if an incident collimated beam emerged as exactly collimated, the system would give geometrically perfect imaging of any point in space. The condition of a real image of a real object for concentric systems and the annular field of Offner system are discussed. The calculating expressions of Offner optical system are given.
出处 《光学仪器》 2005年第2期42-46,共5页 Optical Instruments
关键词 同心系统 三反射镜 环视场 物平面 像平面 concentric system three-reflection mirrors annular field object plane image plane
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参考文献5

  • 1Offner A. New concepts in projection mask aligners[J]. Optical Engineering, 1975, 14(2):130- 132.
  • 2Offner A. Annular field systems and the future of optical microlithography[J]. Optical Engineering, 1987,26 (4) :294-299.
  • 3Charls G W. Monocentric telescopes for microlithography[J]. Optical Engineering, 1987,26 (4):300- 303.
  • 4Paul E. Mirror anastigmat with two concentric spherical surfaces[J]. Journal of the Optical Society of America, 1959,49(9):877-886.
  • 5Lobb D R. Theory of concentric designs for grating spectrometers[J]. Applied Optics, 1994,33(13) :2649-2658.

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