摘要
超微技术是一种新工艺。本文主要介绍了该技术的具体内容。ＬＩＧＡ技术的特点及当前应用情况说明超微技术的实用价值及应用前景。
Ultramicro is a new technology.The article mainly introduced its controls.The features of LIGA and current application showed the applied worthy and future.
出处
《制造技术与机床》
CSCD
1994年第3期38-42,共5页
Manufacturing Technology & Machine Tool
