摘要
建立了一套在气样室内气样压强低于700Pa时均可满足“分子流进样”条件的质谱校准与定量分析系统。通过大量的实验，确定了四极质谱计的工作参数；测定了常用被分析气体的定量系数；并采用实时校准的办法，利用标准气样标定了本装置的系统误差；对各类荧光灯中混合型填充气体的配比和国内外成品荧光灯中的杂质气体含量进行了质谱定量分析；测定了生产中未充入填充气体的灯管内的残气压强。取得了一批对指导生产、改进工艺有用的数据。本系统同样也适用于其他类似场合。
Under the pressure of 700Pa in gas sample chamber, a system of mass spectrum calibration and quantitative analysis to meet the condition of 'molecular flow leak' has been set up. According to the experimental results, the parameters of quadrupole mass spectrometer and the quantitative factors of normal analyzed gases have been determined. By means of instantaneous calibration, the systematic error of this device has been determined by the standard gas sample. For the mixture ratio of mixed filling gases in various nuorescent lamps and the contents of impure gases in finished fluorescent lamps home made as well as from abroad, the mass spectrographic quantitative analysis has been performed. the partial pressure of the residual gases in fluorescent lamps unfilled has been determined also. A number of data which can be used as production guidance and process improvement have been obtained. This system can be used for similar application fields as well.
出处
《真空科学与技术》
CSCD
1994年第2期133-140,共8页
Vacuum Science and Technology
关键词
定量分析
质谱校准
质谱仪
真空
Quantitative analysis, Molecular flow, Masss pectrum calibration
