摘要
文章介绍了混合集成电路内部气氛控制办法。由截断气氛来源入手,从材料的选用、工艺参数的设置、工艺过程的控制等三方面进行了分析,在控制混合电路内部气氛上取得了明显效果。
Methods to control moistures and vapors inside hybrid integrated circuits are presented. Starting from blocking the source of moistures and vapors, the material selection, parameter setting and process control are described in the paper. By taking necessary measures in the process to reduce the moisture content in hybrid circuits, satisfactory results have been achieved.
出处
《微电子学》
CAS
CSCD
北大核心
2005年第2期157-160,共4页
Microelectronics
关键词
混合集成电路
内部气氛控制
聚合材料
可靠性
Hybrid integrated circuit
Moisture and vapor control
Polymer material
Reliability
