摘要
设计了新型的压电晶体传感器探头，使参考晶片与传感晶片同时直接接触待测气体．试验了使用该结构的压电晶体双晶片汞传感器的测汞性能和对水份干扰的影响．实验结果表明：在相当大的范围内．参考晶片接触待测气体并不影响传感器对汞蒸汽的探测，而且还减少了水份等气氛的干扰．
A new type of piezoelectric crystal sensor detector is designed. The referencewafer and the sensitive wafer are in touch with the detected gases directly at thesame time. The mercury vapor response and the interference influence of moistureare tested using the piezoelectric crystal mercury sensor with a double wafer.Results show that in a wide range mercury vapor detection is not influenced bythe sensor,when the reference wafer touches the detected gases. Moreover theinterference of moisture or any other gas can be greatly decreased.
出处
《应用科学学报》
CAS
CSCD
1994年第1期53-56,共4页
Journal of Applied Sciences
关键词
压电晶体
汞传感器
晶片
传感器
piezoelectric crystal,mercury sensor,sensitive water,referencewafer.
