摘要
本文重点是研究在ｐ─—ｎ结自致停腐蚀中引起不稳定的各种因素、各种电极系统的适用性，以及白金对电极界面电位的变化规律，从而有助于正确的设置电极电位，使这种技术得以在实践中广泛使用。
This paper is aimed at the studies of the unstability in p n junction etch -stop etching, the suitable area for various electrode systems and the potential variat ion on the interface of platinum and electrode,The studies are helpful for how to set the electrode potential correctly attemping to make the p─n junction etch─stop etching into a reliable micromachining technology。
出处
《微细加工技术》
1994年第4期48-53,共6页
Microfabrication Technology
基金
国家自然科学基金
