摘要
本文报道了用电调制反射(ER)谱技术测量a-Si太阳电池中非晶硅膜的禁带宽度E_g和厚度均匀性的结果。该技术简单,测量灵敏度和分辨率高,并可直接对成品电池进行测量,无需专门加工样品。另外,ER谱只与a-Si膜的性质有关,不受玻璃和ITO膜的影响。
In this paper, the measurement of homogenity and band gap of a-Si film in solar cell with technique of electroreflectance (ER) spectrum has been studied. The result shows that the measurement of a-Si solar cell with ER spectrum not only has simple technique, high sensitivity and resolving power but also can directly measure a-Si solar cell instead of special sample required. In addition, the feature of ER spectrum depends on the properties of a-Si film only, while it is not affected by glass and ITO film.
出处
《太阳能学报》
EI
CAS
CSCD
北大核心
1989年第3期302-305,共4页
Acta Energiae Solaris Sinica