摘要
采用等离子体源离子注入技术，对Ｃｒ１２Ｍｏｖ钢进行了氮离子注入。用俄歇谱仪和透射电镜对注入层的成分和组织进行了分析，分析结果表明：注入层的氮浓度分布具有类高斯分布特征；注入层中的马氏体组织被细化并有非晶态组织形成。显微硬度和摩擦性能测试结果表明，注入层的显微硬度和摩擦性能得到了明显的提高和改善。
The nitrogen implantation in Cr12MoV steel was performed by Plasma Source Ion lmplantation technique, The composition and microstructure of the implanted layer were investugated by Auger electron spectroscopy and transmission eleLtron microscopy. The results show that the distribution of the n itrogen concentration in thc implanted layer has the characteristic like Gauss and that the martensite structure is fined and an amorphous structure forms in the implanted layer.The microhardness and tribological properties of the implanted layer were measured,It is found that the microhardness and tribological properties are improved obviously.
基金
中科院上海冶金研究所支持项目
关键词
等离子体源
铬钢
离子注入
渗氮
plasma source ion implantation,chromium steel,surface modification
