摘要
基于光栅原理，提出一种可用于任意曲面形貌测量的全息光栅干涉的新方法，给出了光学原理实验系统，系统中采用氦氖激光为光源，反射型柱面全息衍射光栅为标准器，并用计算机软、硬件对光栅信号进行细分处理．实验表明，系统可获得较宽的动态范围和较高的分辨率，可用于测量曲面形貌．
Based on the principle of grating interferometry,a new method for topography measure-ment of curved surfaces using hologram interferometry is described.The principle of this method is studied in detail and an experimental system based on the optical principle is devel-oped.Its light source is a He-Ne laser with a wavelength of 0.632 8 μm and its sensing com-ponent is a reflective cylindrical holographic diffractive grating with a radius of 50 mm andthe spatial frequency is 1200 fringes per mm. The subdivision processing of grating of theinterferometry signals is carried out by softwares and hardwares,Theoretical research re-suIts show that the pulse equivalent of interfering signal is equal to a half of the grating con-stant and does not vary with the wavelength of the incident light.Compared with Michelsoninterferometry,it has a shorter interfering optical path.Experimental investigation showsthat the dynamic measuring range of the system depends on the effective length of the pe-riphery and the resolution of the system depends on the spatial frequency of the grating andthenumber of subdivisions,It is proved by experiment that it is suitable for measuring thetopography of curved surfaces.
出处
《华中理工大学学报》
CSCD
北大核心
1994年第2期60-64,共5页
Journal of Huazhong University of Science and Technology
基金
国家自然科学基金
关键词
曲面形貌测量
光栅干涉
全息光栅
topography measurernent of curved surfaces
grating interferometry
cylindri-cal holographic grating
