摘要
本文描述了一种用于精密工程中超精密测量的宽范围原子力显微镜．当用管状扫描器工作时，测量范围可达２×２μｍ２，能获得原子级的分辨率．当用新开发的宽范围工作台扫描时，测量范围可为１４０×１４０μｍ２，分辨率可在１～１００ｎｍ之间调节．
The atomic force microscope of wide scanning range used in precision engineering ispresented.The atomic resolution of high oriented graphite can be obtained scanning with a tubescanner in the range of 2 ×2μm2. When a new developed elastic stage is used,the wide scanning range of 140 ×140μm2 can be reached,and the resolution of x,y directions can be adjustedin the range of 1～100nm .
基金
国家教委博士点基金
关键词
精密工程
原子力显微镜
超精密测量
Precision engineering
Nanometer accuracy measurement
Atomic force microscope
Wide scanning range
