摘要
研究了几种氮化气氛对硅粉氮化产物的影响，用“归－化”处理的简单方法进行了Ｘ射线定量分析。分析结果表明，硅粉在氨气或氮、氢混合气气氛中，经两个阶段氮化能够较完全地转化为α－Ｓｉ＿３Ｎ＿４占主导地位的氮化硅粉末，而氮化时间相对于硅氮结合法较短。
In this paper the effect of nitriding atmospheres on nitriding of silicon was studied.X-ray diffraction method was used to determine the quantities of phas- es in nitrided samples.The result shows that silicon can be changed completely into silicon nitrides in which α-Si_3N_4 is major in ammonia or mixture of nitrogen and hy- drogen. The time for complete nitriding in these two atmospheres is much shorter than that in the method using nitrogen only.
出处
《钢铁研究学报》
CAS
CSCD
北大核心
1994年第2期35-39,共5页
Journal of Iron and Steel Research
关键词
氮化硅粉末
相分析
氮化法
silicon nitride powder,X-ray diffractornetry,nitriding method
