摘要
ＳＴＭ（扫描隧道显微镜）作为一种新型的纳米加工工具，在微电子制造，量子、分子器件的制作以及在原子分子尺度内的操作与构建等方面有极大的应用潜力。本文对ＳＴＭ纳米加工方法进行了初步分类，简略介绍了其一般工作原理及发展状况，讨论了其未来的应用前景。
As a new tool in nano-technology,STM (Scanning Tunneling Microscope)has a bright application future in the manufacture of microelectronics,quantum and molecular devices,and in the control and construction of atomand moleculars.Present here are a preiiminary classification of STM nano-fabrication,and a brlef introduction of it’S common principles and develop-ment states.Then we have made a discussion about the potential applicationfuture of STM nano-technolgy.
出处
《电工电能新技术》
CSCD
北大核心
1994年第2期18-23,共6页
Advanced Technology of Electrical Engineering and Energy
关键词
STM
纳米加工
纳米技术
STM,nano-fabrication,nano-technology,nano-lithography
