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沉积参数对磁控溅射Cr—N膜相结构的影响 被引量:1

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作者 熊兆奎
出处 《薄膜科学与技术》 1994年第1期24-33,共10页
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  • 1孙道明,蒋益明,高娟,项秋伟,龚佳,李劲.不锈钢点蚀花边盖脱落与稳定生长[J].郑州大学学报(工学版),2009,30(1):70-74. 被引量:11
  • 2严少平,孙雅琴,段冰,顾广颐,蒋百灵.非平衡磁控溅射CrTiAlN镀层摩擦学性能分析[J].安徽理工大学学报(自然科学版),2006,26(4):92-96. 被引量:9
  • 3Yang Q,Cai F,Zhao L R,et al.Improving corrosion resistance of CrTiAlN coating by post-deposition treatments[J].Surface & Coatings Technology,2008,203:606-609.
  • 4Huang Z P,Sun Y,Bell T,et al.Faction behavior of TiN,CrN and (TiAl)N coatings[J].Wear,1994,173:13-20.
  • 5Shicai Yang.Properties and performance of CrTiAlN multilayer hard coatings deposited using magnetron sputtering ion plating[J].Surface Engineering,2002,18(5):391-396.
  • 6Su Q,Hua S,Wutting M.Nondestructive dynamic evaluation of thin NiTi film adhesion[J].Adhes.Sci.Technol.1994,8(6):625-633.
  • 7Talonen J,H-nninen H,Damping properties of austenitic stainless steels containing strain-induced martensite[J].Metall.Mater.Trans.A,2004,35:2401-2406.
  • 8Quiroga J,Ghilarducci A,Mondino M,et al.Anelastic behavior of cold rolled 304 L stainless steel[J].J.Phys.(Paris),1985,10:661-664.
  • 9Colorado H A,Ghilarducci A A,Salva H R,et al.Damage zone produced by the bombardment of stainless steel using Ti nitride PVD coatings[J].Applied Surface Science,2007,254:201-206.
  • 10Colorado H A,Velez J,Salva H R.et al.Damping behavior of physical vapor-deposited TiN coatings on AISI 304 stainless steel and adhesion determinations[J].Materials Science and Engineering A,2006,442:514-518.

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