摘要
超晶格的概念与先进的材料生长技术相结合产生了半导体微结构材料。目前，材料设计、材料生长和深微米技术的一体化，推动着半导体微结构材料向着低维化方向发展。
The semiconductor microstructure materials are emerged from theconcept of superlattice in combination with the advanced material growth tech-nology. At present the integration of material design, material growth and deepmicron technology are giving impetus to the semiconductor microstructure ma-terials to develop towards low dimension.
出处
《半导体情报》
1994年第2期1-7,共7页
Semiconductor Information
关键词
微结构材料
半导体材料
Semiconductor, Microstructure material
