摘要
本文报道了XeCl准分子激光对光学薄膜的损伤阈值、损伤形貌和多脉冲激光的损伤。研究了激光预辐照处理对薄膜损伤的影响。
Laser damage thresholds, morphologies, and multiple pulse damage produced by XeCl excimer laser at 308nm on thin film optical coatings are reported. Effect of the pre-irradiation of the sample on damage threshold is investigated.
出处
《中国激光》
EI
CAS
CSCD
北大核心
1993年第11期829-833,共5页
Chinese Journal of Lasers
基金
国家高科技基金资助项目
关键词
准分子激光
激光损伤
光学薄膜
excimer, laser pre-irradiation, multiple pulse laser damage
