期刊文献+

类金刚石薄膜的同步辐射光电子能谱研究

Study of diamond-like carbon film by synchrotron radiation photoelectron spectroscopy
在线阅读 下载PDF
导出
摘要 利用同步辐射光电子能谱全电子产额模式 (TEY)对石墨、金刚石薄膜和类金刚石薄膜 (DLC)的 C1s X射线吸收谱进行了研究。在高真空里表面净化处理后,在类金刚石薄膜的 C1s 吸收谱中分别观察到对应于金刚石 sp3杂化结构成分和石墨 sp2杂化结构成分的特征峰,说明了类金刚石薄膜是由碳 sp2、sp3两种杂化结构无序混合形成的非晶碳结构;然后,测量了一系列类金刚石薄膜样品的 C1s X 射线光电子能谱 (XPS),得到了每组样品的 sp2/sp3成分比。 We have investigated the C1s X-ray absorption spectra of graphite, diamond and diamond-like carbon (DLC) film using total electron yield mode of the surface sensitive photoelectron spectroscopy. After cleaning the surface in an ultra high vacuum system, we found the feature peaks of the sp3 and sp2 hybridized bonding on the C1s X-ray absorption spectra of DLC, which means that DLC is an amorphous carbon of sp2 mixed with sp3 bonding. And we have measured the C1s photoelectron spectra of a series of DLC films, and calculated the ratios of sp2/sp3.
出处 《核技术》 EI CAS CSCD 北大核心 2005年第2期89-92,共4页 Nuclear Techniques
基金 国家自然科学基金 (10074063)和 (10274084)资助
关键词 类金刚石薄膜(DLC) X射线吸收谱(XAS) X射线光电子能谱(XPS) Diamond-like carbon, X-ray absorption spectra, X-ray photoelectron spectra
  • 相关文献

参考文献16

  • 1阎兴斌,徐洮,王博,杨生荣.用XPS和XAES分析电化学沉积的DLC膜[J].无机化学学报,2003,19(6):569-573. 被引量:3
  • 2程峰.[D].兰州大学,.
  • 3任妮,马占吉,高欣.无氢类金刚石碳膜的研究进展[J].真空科学与技术,2003,23(3):176-181. 被引量:19
  • 4.[EB/OL].http://www. phy. cuhk. edu.hk/~surface/XPSPEAK.,.
  • 5Silva S R P, Robertson J, Milne W I, et al. Amorphous carbon: State of the Art. World Scientific: Singapore,1998.?A
  • 6Lifshitz Y. Diam Relat Mater, 1999, 1659(8): 3179-3200.
  • 7Bushan B. Diam Relat Mater, 1999, 1985(8): 2263-2267.
  • 8Robertson J, Materials Science and Engineering, 2002, 37:129-281.
  • 9Yuan J, Brown L M. Micron 2000, 31:515-525.
  • 10Haerle R, Pasquarello A, Baldereschi A. Computational Materials Science, 2001, 22:67-72.

二级参考文献51

  • 1Amaratunga G A J, Seagal D E, McKenzie D R. Appl Phys Lett, 1991,59:69.
  • 2Kimock F M,Knapp B J.Surf Coat Technol. 1993,56:273.
  • 3Bachman P K, Lade H, Leers D et al. Diamond Relat Mater,1994,3:799.
  • 4Ronning C,Griesmeier U,Gross M et al.Diamond Relat Mater,1995,4:666.
  • 5Tsai H,Bogi D B.J Vac Sci Technol,1987,A5(6) :3287.
  • 6Friedman T A,Sullivan J P, Knapp J A et al. Appl Phys Lett,1997,71(26) :3820.
  • 7Electronic Engineering Times,December 1997,8:381.
  • 8Evans A C, Franks J. Revell P J.Surf Coat Technol, 1991,47:662.
  • 9McHargue C J. Applications of Diamond Films and Related Materials.In:Tzeng Y, Yoshikawa M,Murakawa M et al eds. Materials Science Monographs,New York:Elsevier, 1991:113.
  • 10Lifshitz Y.Diamond and Related Materials, 1999,8:1659~ 1676.

共引文献20

相关作者

内容加载中请稍等...

相关机构

内容加载中请稍等...

相关主题

内容加载中请稍等...

浏览历史

内容加载中请稍等...
;
使用帮助 返回顶部