摘要
在128°Y切割X传播方向上的LiNbO3基片上设计并研制了新型声表面波(SAW)质量传感器。它将输入叉指换能器激发的SAW中心对称分成两路并由各自的输出叉指换能器检测输出。由于环境温度对SAW延迟线振荡器的振荡频率影响较大,传感器的输出不仅决定于质量沉积区所沉积的质量,还决定于测量时所处的环境温度。为此,在SAW质量传感器测量时,同时监测传感器的输入信息质量沉积区的质量和环境温度及其输出频率信息,采用多传感器信息融合技术进行融合处理,质量传感器的温度灵敏度分别从αs0.2=0.8007/℃,αs0.6=0.2488/℃提高到α's0.2=1.71×10-2/℃,α's0.6=3.28×10-3/℃。
A new type SAW device developed on 128° Y cut X LiNbO_3 is reported.SAW excited by input interdigital transducer is divided centrosymmetrically into two paths detected by their output interdigital transducer.As oscillating frequency of acoustic surface wave delay line oscillator is influenced by temperature,output frequency of the sensor is not only determined by deposited mass,but also determined by temperature.In order to improve the measurement accuracy,mass of depositing area,temperature and output frequencies of the sensor are measured and disposed by poly information fusion technology.Coefficient of its temperature sensitivity is improved from 0.800 7/℃,0.248 8/℃ to 1.71×10^(-2)/℃,3.28×10^(-3)/℃ respectively.
出处
《传感器技术》
CSCD
北大核心
2005年第1期60-62,66,共4页
Journal of Transducer Technology
基金
国家自然科学基金资助项目(60176027)
浙江省自然科学基金资助项目(600026)
关键词
声表面波
延迟线振荡器
信息融合
交叉灵敏度
SAW(acoustic surface wave)
delay line oscillator
information fusion
cross sensitivity
