1Masayosi.E.Integrated Micro Flow Control Systems[].Sensors and Actuators.1990
2KohL.F,Jachimowicz.A,Steurer.J.A mIcromachined flow sensor for liquid and gaseous fluids[].Sensors and Actuators.1994
3Guilbert A R,Sanderson M L.The development of curved reflective surfaces for ultrasonic beam redirection in high speed gas flow measurement[].Ultrasonics.1996
