摘要
用一种新型的等离子体浸没式离子注入技术(PIII),在Cr12MoV钢基体上制备了TiN膜,经XPS分析发现,膜中的组织为TiN、TiO2和Ti2O3。对有与无TiN膜的Cr12MoV钢试样进行对比,测定了维氏硬度,耐磨性以及磨痕。结果表明:TiN膜具有高的硬度和优良的抗摩擦性能。
TiN films were prepared by a new plasma immersion ion implantation-ion beam assisted deposition(PIII-IBAD) on Cr12MoV steel. It was found by X-ray photoelectron spectroscopy(XPS) analysis that the TiN films were composed of TiN, TiO_2 and Ti_2O_3. The hardness and wearing resistance of the TiN films were determined by Vickers microhardness experiment and sliding friction experiment, and the wearing traces on the specimens after sliding friction experiment were analyzed by scanning electron microscopy (SEM) in comparing with untreated specimens of Cr12MoV steel. The results of the experiments indicate that the TiN films have very high hardness and fine wearing resistance.
出处
《机械工程材料》
CAS
CSCD
北大核心
2004年第11期19-21,共3页
Materials For Mechanical Engineering
基金
中国科学院上海微系统与信息技术研究所离子束重点实验室应用基础研究基金资助项目(100027)
