摘要
为了寻找制备梯度金属薄膜的新方法和新工艺 ,采用脉冲准分子激光扫描沉积技术 ,在Si(10 0 )单晶衬底上沉积了Al/Ag掺杂功能梯度薄膜 ,并采用SEM和XPS对制备的薄膜进行了微观分析。分析结果表明 ,运用合适的激光参数和辅助放电 ,在沉积温度 30 0℃时 ,制备出了Al/Ag组分比近似为 5∶1的掺杂梯度薄膜。该实验方法说明 ,利用脉冲激光与金属掺杂靶相互作用沉积梯度金属薄膜是可行的。
Metal gradient thin films have many excellent properties and a wide use.The aim of our research is to find new method and new techniques of preparing metal gradient thin films.Al/Ag doping functional gradient thin films have been successful synthesized on Si (100) substrate by using scanning pulsed excimer laser ablation technique.The structure of Al/Ag thin films deposited by pulsed laser deposition(PLD) is analyzed by scanning electron microscope(SEM),X-ray photoelectron spectroscopy(XPS).The experimental results illustrate that applying appropriate laser parameter and assistant discharge can synthesize the Al/Ag thin films with approximate ratio 5∶1 at the 300℃.This experimental method indicates that it is feasible to deposit functional gradient metal thin films by means of the interaction between pulsed laser and metal doping target.
出处
《激光技术》
CAS
CSCD
北大核心
2004年第5期463-465,468,共4页
Laser Technology
关键词
Al/Ag掺杂薄膜
脉冲激光沉积
微观分析
工艺参数
Al/Ag doping thin films
pulsed laser deposition(PLD)
micro-structure analysis
process parameter
