摘要
硅化铱肖特基势垒列阵,是一种新近发展起来的用于长波红外(8～14μm)成像的焦平面技术。本文叙述了硅化铱肖特基势垒列阵的工作原理、结构及关键工艺,并介绍了该器件的发展状况。
IrSi Schottky-barrier array is a new developed device for long wavelength (8～14μm) infrared focal plane imaging. In this paper, the basic principles, structure, and key fabrication processes of IrSi Schottky-barrier arrays are discussed. The state of the art of the devices is introduced.
出处
《红外技术》
CSCD
1993年第5期12-15,共4页
Infrared Technology
