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微槽道内气体流动的数值模拟 被引量:2

Numerical Analysis of Gaseous Flow in Micro-Channels
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摘要 基于微尺度流动的滑移模型,建立了二维微槽道内气体流动的计算方法,并开发了计算程序.对相关文献中微槽道内的气体流动进行了计算,得到了压力降和速度分布剖面图,计算结果与试验结果吻合较好.在此基础上,进一步研究了克努森数Kn、切向动量调节系数σv及雷诺数Re对速度分布的影响.当Kn>0.001时,边界滑移速度随着Kn的增大而增大;σv的变化对滑移速度的影响十分显著,σv减小时,边界滑移速度增大;在滑流区范围内与低Re时,Re的变化对边界滑移速度的影响很小. The algorithm of gaseous flow in two-dimensional micro-channels was set up and the corresponding program based on micro-flow theory was developed. The gaseous flow in micro-channels was numerically analyzed and the pressure drop as well as velocity profile of the micro-channels was obtained. The numerical results agree well with the experimental results. Moreover, the effects of Kn, σv and Re on the velocity profiles were analyzed. When Kn>0.001, with the increasing of Kn number, the slip velocity on wall boundary increases; The tangential momentum coefficient σv affects greatly on the slip velocity, with the decreasing of σv, the slip velocity increases; And Re number makes little effect on the slip velocity under the condition of low Re number and slip flow regime.
出处 《上海交通大学学报》 EI CAS CSCD 北大核心 2004年第10期1695-1698,共4页 Journal of Shanghai Jiaotong University
基金 国家自然科学基金资助项目(50276034)
关键词 微槽道 气体流动 数值模拟 克努森数 滑移 Computer simulation Gas dynamics Navier Stokes equations Pressure drop Slip forming Two dimensional
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  • 1Tison S A. Experimental data and theoretical model ing of gas flows through metal capillary leaks [J].Vacuum, 1993,44 : 1171 - 1175.
  • 2Shih J C, Ho C M, Liu J, et al. Monatomic and polyatomic gas flow through uniform micro-channels[A].Applications of Microfabrication to Fluid Mechanics [C]. NY,USA:ASME DSC,1996.59:197-203.
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