摘要
本文讨论了加速电压和样品表面粗糙度对X射线能谱仪(EDS)分析精度的影响。结果表明:不同元素的特征X射线强度最大值所对应的加速电压不同;当加速电压一定时,表面粗糙对特征X射线强度的影响是造成分析误差的主要原因之一。
The influence of the accelerating voltage and surface rough degree of specimen on measuring precision of en- ergy dispersive X-ray microanalysis(EDS)is discussed. The results show the accelerating voltage corresponding to maximum intensity of characteristic X-ray of different elements is different. When accelerating voltage is maintained, the influence of surface rough degree of specimen on intensity of characteristic X-ray is one of main resons of analysis errors.
出处
《电子显微学报》
CAS
CSCD
1993年第4期352-355,共4页
Journal of Chinese Electron Microscopy Society
