摘要
硅微电子兼容技术是微电子技术与其它相关技术相互结合的产物,是微电子学科领域的重要发展方向之一,并使其在性能和应用领域等方面得到进一步的提高和扩展.本文主要介绍GaAs/Si、SiGe/Si、LB/Si、低温微电子、真空微电子和超导/半导兼容技术的新进展和发展趋.
Silicon compatible technique is the result of combining other relative technique with microelectronics, it is one of the most important devclopment in these areas, which greatly improved and extended its properties and applications. The recent progress and the development of GaAs/Si, SiGe /Si LB / Si Cryogenic microelectronics, Vacumm microelectronics andSuperconductor / Semiconductor techniques will be discussed in detail in this paper.
出处
《电子器件》
CAS
1993年第2期60-66,75,共8页
Chinese Journal of Electron Devices
关键词
硅
微电子
兼容技术
Silicon, Microelectronics, Compatible Technique
