摘要
介绍了飞秒激光与金属相互作用的机理以及飞秒激光在金属超加工方面的一些最新应用。基于一维双温扩散模型分析了飞秒激光与金属相互作用的超快机制;介绍了飞秒激光加工光电倍增管电极,修复光刻掩膜,诱导白炽灯丝阵列微孔等一些工业应用。
The mechanism and some state of the art applications of femtosecond laser induced metal microstructures are introduced. Based on the one-dimensional, two-temperature diffusion model, the ultrafast mechanism of femtosecond laser interaction with metals is analyzed. Some industrial applications including micromachining dynodes of photomultipliers, repairing photomask of lithography, fabricating array micro-holes in incandescent filaments, etc. are introduced.
出处
《激光与光电子学进展》
CSCD
2004年第6期46-50,共5页
Laser & Optoelectronics Progress
关键词
飞秒激光
金属超加工
激光烧蚀
功能微结构
femtosecond laser functional microstructure laser microprocessing laser ablation metal
