摘要
分析了超光滑反射镜基片的表面波度对反射率的影响。利用Form Talysurf轮廓仪和高分辨率激光轮廓仪对经古典抛光法加工的基片进行检测,其表面波度的波幅为5～30nm,波距为100～150μm。还分析了古典抛光法表面波度的形成规律,并给出了实测结果。
Effect of surface waviness of ultra-smooth reflector substrates on their reflectivity is discussed. A substrate prepared by classical optical polishing is checked by a Form Talysurf and a high resolution laser profilometer. The height and spacing are respectively 5～30nm and 100～150μm. In addition, a forming rule of surface waviness of the substrates polished by classical method is discussed and measured results are given.
出处
《航空精密制造技术》
1992年第6期6-8,共3页
Aviation Precision Manufacturing Technology
关键词
反射镜基片
表面波度
波度形成
reflector substrate surface waviness formation of surface waviness
