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Improvement of tribological responses of sputtered MoSx films by indium ion implantation

Improvement of tribological responses of sputtered MoSx films by indium ion implantation
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摘要 Molybdenum disulfide (MoS_2) has been applied to various space mechanisms as solid lubricant. The tribological characteristics of sputtered MoSx films have been improved by inert gas ion implantation. We tried to extend the wear life and reduce friction coefficient by high energy implantation of indium ions. In friction tests, a pin-on-disk tester was used to measure friction coeffi- cient and wear life in a vacuum, dry air and air of 30%, 50% and 80% RH. Indium ions implanted the film at a dose of 1×10^(16) ions/cm^2 exhibited friction coefficient of 0.008 and 5.0 times longer wear life than the unimplanted ones did. However, the wear life of this film tested in high humid air presented no im- provement. Molybdenum disulfide (MoS<sub>2</sub>) has been applied to various space mechanisms as solidlubricant. The tribological characteristics of sputtered MoSx films have been improved by inert gasion implantation. We tried to extend the wear life and reduce friction coefficient by high energyimplantation of indium ions. In friction tests, a pin-on-disk tester was used to measure friction coeffi-cient and wear life in a vacuum, dry air and air of 30%, 50% and 80% RH. Indium ions implanted the filmat a dose of 1×10<sup>16</sup> ions/cm<sup>2</sup> exhibited friction coefficient of 0.008 and 5.0 times longer wear life thanthe unimplanted ones did. However, the wear life of this film tested in high humid air presented no im-provement.
出处 《Science China Mathematics》 SCIE 2001年第S1期343-347,共5页 中国科学:数学(英文版)
关键词 INDIUM ion IMPLANTATION sputtered MoSx film low FRICTION COEFFICIENT indium ion implantation sputtered MoSx film low friction coefficient
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