摘要
为了探寻微小物体非接触形貌测量的有效途径,采用多光纤干涉所形成的光场,提出了三光纤反射莫尔干涉轮廓测量方法.利用3根高双折射光纤,构成了光纤莫尔干涉光场生成器,给出了计算机仿真结果.实验上,讨论了莫尔光场生成器的设计和制作方法,实现了方形格子和六角形周期格子的光场分布.给出了光纤莫尔干涉测量系统的结构和组成,以半球形物体轮廓测量为例,展示了如何应用光纤莫尔干涉技术实现微小物体形貌的测量.开拓了光纤莫尔测量新方法.
To develop an effective way to measure a three-dimensional shape of a small object by a non-contact method,a novel profilometry was proposed and demonstrated based on multi-fiber optic Moiré interferometric technique. The square and hexagon lattice interferometric fringe pattern by using three Hi-Bi fibers was designed and performed. The design and fabrication method of fiber optic interferometric grid pattern generators were discussed. Theoretically, the three-fiber coherence optical intensity distribution was simulated and the simulation results was presented. The configuration of the measuring system was introduced and a small half-sphere, as an example,was used to demonstrate how to utilize the fiber optic Moiré interferometric technique for mapping a small object.
出处
《哈尔滨工程大学学报》
EI
CAS
CSCD
2004年第3期384-388,共5页
Journal of Harbin Engineering University
基金
教育部高等学校优秀青年教师教学科研奖励计划基金资助项目.
关键词
光纤
莫尔
光纤莫尔干涉
轮廓测量
optical fiber
Moiré
fiber optic Moiré interferometer
profilometry
