摘要
The preparation technology of microlayer composite material by the electron beam physical vapor deposition (EBPVD) technique was briefly introduced. Taking the advantage of the large-scale commercial softvare of finite element analysis, areasonable physical model was built up during the deposition processing and the distribution of residual stress was analyzedbetween substrate and deposition layer or among deposition layers. The results show that: with the increasing substrate preheating temperature, the interlaminar shear stress increases but the axial residual stress decreases. The probability of curlingup after de-bonding tends to enhance as the thickness of deposition film increases.
基金
This work was supported by the Natural Science Foundation of Hei Longjiang Province (E01-07) and China Postdoctoral Science Foundation that support this research (LB0047).
