摘要
High-quality ITO films on flexible PET substrate were prepared by RF magnetron sputtering at low deposition temperature with different Ar gas sputtering pressure.Adhesion and electro-optical properties of ITO films were investigated as a function of Ar partial pressure.The sputtering conditions provide very uniform ITO films with high transparency(>85%in 400-760 nm spectra)and low electrical resistivity(1.408×10^(-3)-1.956×10^(-3)Ω·cm).Scratch test experiments indicate that there is a good adhesion property between ITO films and PET substrate,the critical characteristic load increases from 16.5 to 23.2 N with increasing Ar sputtering pressure from 0.2 to 1.4 Pa.
基金
This work was financially supported bythe Sichuan Outstanding Youth Foundation of China(No.04ZQ026-008)
Thanks are due to the Foundation Franco Chinoise pour la Science et ses Applications(FF-CSA)
