摘要
基于微透镜阵列的基本光学原理,建立了一套评价微透镜光学质量的微光学测试系统.该系统可以测量微透镜的点扩散函数、衍射效率、焦长等特征性能参数,从而可以有效地对微透镜阵列进行评价.讨论了微透镜的各种参数的基本概念和测量方法,同时分析了测量中的误差影响因素.
Based on the fundamental optical theory of microlens array,the microlens array testing platform which can be used to evaluate the optical quality of microlens was set up.The characteristic parameters of microlens array such as point-spread function,diffraction efficiency,and focal length which were described in this paper can be measured with this testing platform,thus the microlens array can be effectively evaluated.This method has the features of simplicity and easy to be realized.It is suitable for measu...
出处
《华中科技大学学报（自然科学版）》
EI
CAS
CSCD
北大核心
2007年第S1期93-96,共4页
Journal of Huazhong University of Science and Technology(Natural Science Edition)
基金
国家自然科学基金资助项目(60086003)
关键词
微透镜阵列
光学性能
测试
误差因素
microlens array
optical performance
measurement
error factor
