摘要
采用溶胶凝胶(Sol-Gel)技术制备了SnO2∶(Sb,In)薄膜,优化了制备工艺参数,应用差示扫描量热仪-热重分析仪(DSC-TGA)、X射线衍射仪(XRD)等手段对薄膜进行了表征.结果表明,氯化亚锡、乙醇和水摩尔比为1∶20∶4时成胶状态最佳,当锑和铟的掺杂量分别为7%和4%时,在500℃氮、氢混合气氛下煅烧2 h制备的薄膜表面平整,方块电阻大约为40.5Ω,紫外-可见光透射率达88%.
SnO2∶(Sb,In) thin films were prepared by sol-gel process,in which the technique parameters of preparing were optimized and the better conditions of preparing were received.The samples′ thermic weightlessness,morphology and structure were characterized by differential scanning calorimentry and thermogravimetric analysis(DSC-TGA),X-ray diffraction and so on.The result indicates the quality of colloid will be better when the mol ratio of SnCl2,ethanol and water is 1∶20∶4;the ultraviolet-eyeable light transmiss...
出处
《华中科技大学学报（自然科学版）》
EI
CAS
CSCD
北大核心
2007年第S1期81-84,92,共5页
Journal of Huazhong University of Science and Technology(Natural Science Edition)
基金
陕西省自然科学专项基金资助项目(2005F39)
西北大学科研基金资助项目(04NW57)
关键词
溶胶疑胶
二氧化锡
透明导电薄膜
sol-gel technique
SnO2
transparent and conducting thin film
