摘要
为降低Ka波段分布式MEMS移相器容性开关的驱动电压,提出不同形状新型低弹性系数铰链梁结构MEMS电容开关的机电设计概念.采用Intelli SuiteTM和ADS软件分析了三种梁结构MEMS电容开关的位移分布、驱动电压、机械振动模式和射频性能等参数,结果表明:所设计新型beam2结构MEMS电容开关具有优越的机电特性和射频特性,即开关的驱动电压为3V,机械振动模式固有频率都大于31kHz,在35GHz处插入损耗和回波损耗分别为0.082dB和18.6dB,而相移量可达到105.9o.
The RF MEMS capacitive switches have demonstrated great potential in microwave phase shifters and millimeter-wave circuits and devices due to their very low loss,low power consumption,and low cost characteristics.To reduce the driven-voltage of switches based on Ka band distributed MEMS phase shifters,the mechanical designs of different low spring-constant hinge beam structure are presented.The displacement distribution,driven voltage,mechanical modes and RF performance of the switches using these beams are...
出处
《电子器件》
CAS
2007年第5期1835-1838,共4页
Chinese Journal of Electron Devices
基金
国家自然科学基金资助项目(60571026)
哈尔滨工业大学跨学科交叉性研究基金资助(HITMD200307)
关键词
MEMS移相器
电容开关
低驱动电压
机电特性
射频特性
MEMS phase shifters
capacitive switches
low driven-voltage
electromechanical performance
RF performance
