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高分辨率TMR传感器阵列磁场成像涡流检测探头 被引量:15

ECT probe based on magnetic field imaging with a high resolution TMR sensor array
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摘要 提出了一种基于高分辨率隧道效应磁阻(TMR)传感器阵列和双排圆形三相激励线圈磁场成像的新型涡流检测探头。由相位相差120°的三相电流激励的线圈在空间上交替排列,因此对应感应涡流在导电样品中交替变化,从而宏观上产生在空间移动的涡流和磁场。TMR阵列可对磁场成像检测出样品中存在的缺陷。TMR传感器阵列含64个传感器,测得的磁场图像具有0.5 mm的空间分辨率。基于压缩磁矢势方程,建立三维有限元仿真模型来研究该阵列探头的工作原理,并仿真预测该探头对不同方向和尺寸缺陷的检测图像;还制作了一个探头样机,用来检测含有人工缺陷的铝样品。结果表明该探头能有效检出不同方向的缺陷和尺寸为1 mm×0.2 mm×1 mm深的微小缺陷。 This paper proposes a new eddy current testing(ECT)probe based on high-resolution tunnel magnetoresistance(TMR)sensor array and magnetic field imaging with two row circular three-phase excitation coils.The excitation coils driven by three-phase currents that are 120°apart in phase are alternatively arranged in space,which results in the corresponding induced eddy currents alternatively changing in the conductive sample.From a macroscopic perspective,the eddy and magnetic field shifting in space is generated.The TMR sensor array can detect the defect in sample by imaging the magnetic field.The TMR sensor array contains 64 sensors,with which the magnetic field image with spatial resolution of 0.5 mm is obtained.Based on the reduced magnetic vector potential formulation,a three-dimensional finite element simulation model is established to study the operating principle of the probe and to predict the detection images of the probe for the defects with different orientations and dimensions.In addition,a prototype probe was developed to inspect an aluminum sample with artificial defects.The experiment results demonstrate that the probe is capable of detecting the defects with different orientations effectively and identifying the micro defect with length of 1 mm,width of 0.2 mm and depth of 1 mm.
作者 张娜 彭磊 吴瑶 陶钰 Zhang Na;Peng Lei;Wu Yao;Tao Yu(School of Information Science and Technology,Shanghai Tech University,Shanghai 201210,China;Shanghai Institute of Microsystem and Information Technology,Chinese Academy of Sciences,Shanghai 200050,China;University of Chinese Academy of Sciences,Beijing 100049,China;Unit 91033 of PLA,Qingdao 266000,China)
出处 《仪器仪表学报》 EI CAS CSCD 北大核心 2020年第7期45-53,共9页 Chinese Journal of Scientific Instrument
关键词 涡流检测 阵列探头 三相激励 TMR传感器 磁场成像 eddy current testing array probe three-phase excitation TMR sensor magnetic field imaging
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