ZrCoRE(RE denotes rare earth elements)non-evaporable getter films have significant applications in vacuum packaging of micro-electro mechanical system devices because of their excellent gas adsorption performance,low ...ZrCoRE(RE denotes rare earth elements)non-evaporable getter films have significant applications in vacuum packaging of micro-electro mechanical system devices because of their excellent gas adsorption performance,low activation temperature and environmental friendliness.The films were deposited using DC magnetron sputtering with argon and krypton gases under various deposition pressures.The effects of sputtering gas type and pressure on the morphology and hydrogen adsorption performance of ZrCoRE films were investigated.Results show that the films prepared in Ar exhibit a relatively dense structure with fewer grain boundaries.The increase in Ar pressure results in more grain boundaries and gap structures in the films.In contrast,films deposited in Kr display a higher density of grain boundaries and cluster structures,and the films have an obvious columnar crystal structure,with numerous interfaces and gaps distributed between the columnar structures,providing more paths for gas diffusion.As Kr pressure increases,the film demonstrates more pronounced continuous columnar structure growth,accompanied by deeper and wider grain boundaries.This structural configuration provides a larger specific surface area,which significantly improves the hydrogen adsorption speed and capacity.Consequently,high Ar and Kr pressures are beneficial to improve the adsorption performance.展开更多
基金National Natural Science Foundation of China(62171208)Natural Science Foundation of Gansu Province(23JRRA1355)。
文摘ZrCoRE(RE denotes rare earth elements)non-evaporable getter films have significant applications in vacuum packaging of micro-electro mechanical system devices because of their excellent gas adsorption performance,low activation temperature and environmental friendliness.The films were deposited using DC magnetron sputtering with argon and krypton gases under various deposition pressures.The effects of sputtering gas type and pressure on the morphology and hydrogen adsorption performance of ZrCoRE films were investigated.Results show that the films prepared in Ar exhibit a relatively dense structure with fewer grain boundaries.The increase in Ar pressure results in more grain boundaries and gap structures in the films.In contrast,films deposited in Kr display a higher density of grain boundaries and cluster structures,and the films have an obvious columnar crystal structure,with numerous interfaces and gaps distributed between the columnar structures,providing more paths for gas diffusion.As Kr pressure increases,the film demonstrates more pronounced continuous columnar structure growth,accompanied by deeper and wider grain boundaries.This structural configuration provides a larger specific surface area,which significantly improves the hydrogen adsorption speed and capacity.Consequently,high Ar and Kr pressures are beneficial to improve the adsorption performance.
基金National Natural Science Foundation of China(51804251,52104384)Science Fund of Shandong Laboratory of Yantai Advanced Materials and Green Manufacturing(AMGM2021F04)+5 种基金Shandong Provincial Natural Science Foundation(ZR2021ME168,ZR2021JQ20)Planning Project of Xiology(21XJZZ0041)LICP Cooperation Foundation for Young Scholars(HZJJ21-07)Taishan Scholars Program of Shandong ProvinceYo’an Science and Technuth Innovation Promotion Association(CAS 2021423)Key Research and Development Program of Shaanxi(2023-YBGY-343)。
基金National Key R&D Program of China(2022YFB3705400)Major Scientific and Technological Projects in Shaanxi Province of China(2020ZDZX04-02-01)+6 种基金Scientific and Technological Innovation Team Project of Shaanxi Innovation Capability Support Plan of China(2022TD-30)the Fok Ying Tung Education Foundation(171101)Youth Innovation Team of Shaanxi Universities(2019-2022)Top Young Talents Project of“Special Support Program for High level Talents”in Shaanxi Province(2018-2023)China Postdoctoral Science Foundation(2021M693878)Service Local Special Program of Education Department of Shaanxi Province,China(21JC016)Key R&D Program of Shaanxi Province,China(2021GY-209)。
基金Natural Science Basic Research Program of Shaanxi Province(2022JQ-466)Doctoral Scientific Research Foundation of Xi’an Polytechnic University(107020535)。
