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Design of MMI 1×8 Optical Power Splitters Used Si-based SiO_2 Waveguide
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作者 WUXiao-jing LUOFeng-guang 《Semiconductor Photonics and Technology》 CAS 2004年第3期168-173,共6页
An initial structure design of MMI 1×8 optical power splitters is reported.The waveguide material is Si-based SiO2 Ge-doped and deposited by PECVD method.Embedded strip structure is implied in the section design.... An initial structure design of MMI 1×8 optical power splitters is reported.The waveguide material is Si-based SiO2 Ge-doped and deposited by PECVD method.Embedded strip structure is implied in the section design.By using BPM-CAD,a favorable result is obtained that this device has a sound uniformity and fairly low loss.Meanwhile,simulations of designs with certain changed parameters is also implemented for a better design configuration. 展开更多
关键词 Optical power splitter Multimode interference WAVEGUIDE
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