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Chemical Structure of Carbon Nitride Films Prepared by MW-ECR Plasma Enhanced Magnetron Sputtering
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作者 XUJun,GAOPeng DINGWan-yu LIXin DENGXin-lu DONGChuang 《材料热处理学报》 EI CAS CSCD 北大核心 2004年第05B期818-820,共3页
Amorphous carbon nitride thin films were prepared by plasma-enhanced DC magnetron sputtering using twinned microwave electron cyclotron resonance plasma sources. Chemical structure of deposited films was investigated ... Amorphous carbon nitride thin films were prepared by plasma-enhanced DC magnetron sputtering using twinned microwave electron cyclotron resonance plasma sources. Chemical structure of deposited films was investigated using X-ray photoelectron spectroscopy and Fourier transform infrared spectroscopy. The results indicate that the deposition rate is strongly affected by direct current bias, and the films are mainly composed of a single amorphous carbon nitride phase with N/C ratio close to C3N4, and the bonding is predominantly of C^N type. 展开更多
关键词 碳氮化物 MW-ECR 磁控管溅射 等离子增强沉积 化学结构
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HIGH-CURRENT PULSED ELECTRON BEAM: RAPID SURFACE ALLOYING AND WEAR RESISTANCE IMPROVEMENT
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作者 J.Xu H.W.Liu +5 位作者 Z.R.Zhou C.Dong A.M.Wu S.Z.Hao A.M.Zhang T.Xu 《Acta Metallurgica Sinica(English Letters)》 SCIE EI CAS CSCD 2003年第4期276-282,共7页
The present paper reports the rapid surface alloying induced by the bombardment of high-current pulsed electron beam. Two kinds of substrate materials were examined to show this effect. The first sample was a pure Al ... The present paper reports the rapid surface alloying induced by the bombardment of high-current pulsed electron beam. Two kinds of substrate materials were examined to show this effect. The first sample was a pure Al metal pre-coated with fine carbon powders prior to the bombardment, and the second alloy is the D2-Crl2MolVl mould steel pre-coated with Cr, Ti, and TiN powders. The surface elements diffuse about several micrometers into the substrate materials only after several bombardments. Tribological behaviors of these samples were characterized and significant improvement in wear resistance was found. Finally, a TEM analysis reveals the presence of stress waves generated by coupled thermal and stress fields, which was considered as the main cause of the enhanced properties. 展开更多
关键词 high-current pulsed electron beam surface alloying TRIBOLOGY fretting wear
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