With the surge in fifth-generation(5G)wireless systems and escalating growth of data traffic,the push for higher carrier frequencies with wider bandwidths intensifies.This work reveals the outstanding capabilities of ...With the surge in fifth-generation(5G)wireless systems and escalating growth of data traffic,the push for higher carrier frequencies with wider bandwidths intensifies.This work reveals the outstanding capabilities of wafer-level longitudinal leaky surface acoustic wave(LLSAW)devices on the lithium niobate on insulator(LNOI)platform in scaling SAW technology beyond 4 GHz by mass-produced lithography.Leveraging SiC-based LNOI,the fabricated LLSAW resonators showcase remarkable quality factor(Q),scalable electromechanical factor k_(eff)^(2)from 14%to 28%,and record high figure-of-merit(FoM)of 166 to 222 at 5-6 GHz.Targeted for diverse bands,LLSAW filters with adaptable bandwidths have been realized on specific LN-on-SiC platforms.The filters covering the n79 full band with a minimum insertion loss(IL_(min))of 0.85 dB and the 5 GHz Wi-Fi full band with an IL_(min)of 1.62 dB,have been demonstrated for the first time.These findings position LLSAW on LN-on-SiC platform as a promising commercial-grade candidate for pushing the SAW paradigm towards high frequency and wideband filtering.展开更多
基金supported in part by the National Key Research and Development Program of China(Grant No.2022YFB3606700)Natural Science Foundation of Beijing Municipality(Grant No.JQ20010)National Natural Science Foundation of China(Grant No.52002205)。
文摘With the surge in fifth-generation(5G)wireless systems and escalating growth of data traffic,the push for higher carrier frequencies with wider bandwidths intensifies.This work reveals the outstanding capabilities of wafer-level longitudinal leaky surface acoustic wave(LLSAW)devices on the lithium niobate on insulator(LNOI)platform in scaling SAW technology beyond 4 GHz by mass-produced lithography.Leveraging SiC-based LNOI,the fabricated LLSAW resonators showcase remarkable quality factor(Q),scalable electromechanical factor k_(eff)^(2)from 14%to 28%,and record high figure-of-merit(FoM)of 166 to 222 at 5-6 GHz.Targeted for diverse bands,LLSAW filters with adaptable bandwidths have been realized on specific LN-on-SiC platforms.The filters covering the n79 full band with a minimum insertion loss(IL_(min))of 0.85 dB and the 5 GHz Wi-Fi full band with an IL_(min)of 1.62 dB,have been demonstrated for the first time.These findings position LLSAW on LN-on-SiC platform as a promising commercial-grade candidate for pushing the SAW paradigm towards high frequency and wideband filtering.
