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微桌面深硅刻蚀系统SF_(6)/O_(2)/C_(4)F_(8)三元气体刻蚀工艺研究
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作者 刘钊成 连紫薇 +3 位作者 赵鸿滨 Parker Gould Mitchell Hsing 魏峰 《稀有金属》 北大核心 2025年第7期1113-1118,共6页
本文通过微桌面深硅刻蚀系统对非BOSCH三元气体刻蚀工艺进行了研究。对比了SF_(6)/O_(2), SF_(6)/C_(4)F_(8)和SF_(6)/O_(2)/C_(4)F_(8)三种刻蚀气体对于硅刻蚀中刻蚀速率、刻蚀轮廓、选择比以及粗糙度的影响,发展了基于SF_(6)/O_(2)/C_... 本文通过微桌面深硅刻蚀系统对非BOSCH三元气体刻蚀工艺进行了研究。对比了SF_(6)/O_(2), SF_(6)/C_(4)F_(8)和SF_(6)/O_(2)/C_(4)F_(8)三种刻蚀气体对于硅刻蚀中刻蚀速率、刻蚀轮廓、选择比以及粗糙度的影响,发展了基于SF_(6)/O_(2)/C_(4)F_(8)三元混合气体深硅刻蚀工艺。通过光学显微镜(OM)、扫描电子显微镜(SEM)、三维光学轮廓仪对刻蚀后硅沟槽的刻蚀深度、侧壁垂直度、选择比以及底面粗糙度进行了分析。结果表明,在SF_(6)中加入O_(2)有催化SF_(6)等离子体产生氟自由基的作用,同时又可以与硅反应生成Si_(x)O_(y)F_(z)聚合物沉积在硅沟槽侧壁阻止SF_(6)对侧壁的刻蚀,得到各向异性刻蚀,但是较低的选择比导致无法深刻。在SF_(6)中加入C_(4)F_(8)虽然解决了选择比与刻蚀轮廓的问题,但是刻蚀速率过低。而在室温下将少量C_(4)F_(8)加入SF_(6)/O_(2)中构成的SF_(6)/O_(2)/C_(4)F_(8)三元气体刻蚀工艺不仅能够提高刻蚀选择比、降低底面粗糙度,还能提高刻蚀速率。 展开更多
关键词 深硅刻蚀 SF_(6)/O_(2)/C_(4)F_(8)混合气体 各向异性 刻蚀速率 选择比
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Automatic synthesis of light-processing functions for programmable photonics:theory and realization 被引量:3
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作者 ZHENGQI GAO XIANGFENG CHEN +3 位作者 ZHENGXING ZHANG UTTARA CHAKRABORTY WIM BOGAERTS DUANE S.BONING 《Photonics Research》 SCIE EI CAS CSCD 2023年第4期643-658,共16页
Linear light-processing functions(e.g.,routing,splitting,filtering)are key functions requiring configuration to implement on a programmable photonic integrated circuit(PPIC).In recirculating waveguide meshes(which inc... Linear light-processing functions(e.g.,routing,splitting,filtering)are key functions requiring configuration to implement on a programmable photonic integrated circuit(PPIC).In recirculating waveguide meshes(which include loop-backs),this is usually done manually.Some previous results describe explorations to perform this task automatically,but their efficiency or applicability is still limited.In this paper,we propose an efficient method that can automatically realize configurations for many light-processing functions on a square-mesh PPIC.At its heart is an automatic differentiation subroutine built upon analytical expressions of scattering matrices that enables gradient descent optimization for functional circuit synthesis.Similar to the state-of-the-art synthesis techniques,our method can realize configurations for a wide range of light-processing functions,and multiple functions on the same PPIC simultaneously.However,we do not need to separate the functions spatially into different subdomains of the mesh,and the resulting optimum can have multiple functions using the same part of the mesh.Furthermore,compared to nongradient-or numerical differentiation-based methods,our proposed approach achieves 3×time reduction in computational cost. 展开更多
关键词 synthesis. SYNTHESIS FUNCTIONS
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