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Theoretical Study of Dibenzothiophene Based Electron Transport Materials
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作者 Asanga B. Padmaperuma 《Advances in Materials Physics and Chemistry》 2012年第4期219-225,共7页
Density functional methods have been used for the calculation of electronic structures, electronic transitions, vertical electron affinities and intermolecular reorganization energies for tri-aryl substituted dibenzot... Density functional methods have been used for the calculation of electronic structures, electronic transitions, vertical electron affinities and intermolecular reorganization energies for tri-aryl substituted dibenzothiophenes. These model compounds were then compared to the predicted values for dibenzo[b,d]thiophen-2-yltriphenylsilane (DBTSI 2) and to dibenzo[b,d]thiophene-2,8-diylbis(diphenylphosphine oxide) (PO15), known electron transport molecules. The results indicate that these model compounds can be used in a blue OLED system. 展开更多
关键词 OLED ELECTRON Transport MOLECULES PO15 DIBENZOTHIOPHENE DFT TD-DFT
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Facet-Dependent Performance of Microstructured SrTiO_(3) Particles in Photocatalytic Oxidation of Acetone
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作者 Nathália Tavares Costa Daniel Monteiro Cunha +5 位作者 Kaijian Zhu Annemarie Huijser Georgios Katsoukis Kasper Wenderich Jitte Flapper Guido Mul 《Energy & Environmental Materials》 2025年第3期161-171,共11页
Photocatalysis is a promising technology for purification of indoor air by oxidation of volatile organic compounds.This study provides a comprehensive analysis of the adsorption and photo-oxidation of surface-adsorbed... Photocatalysis is a promising technology for purification of indoor air by oxidation of volatile organic compounds.This study provides a comprehensive analysis of the adsorption and photo-oxidation of surface-adsorbed acetone on three SrTiO_(3)morphologies:cubes(for which exclusively{100}facets are exposed),{110}-truncated cubes,and{100}-truncated rhombic dodecahedrons,respectively,all prepared by hydrothermal synthesis.In situ Diffuse Reflectance Infrared Fourier Transform Spectroscopy shows that cubic crystals contain a high quantity of surface-OH groups,enabling significant quantities of adsorbed acetone in the form ofη^(1)-enolate when exposed to gas phase acetone.Contrary,{110}facets exhibit fewer surface-OH groups,resulting in relatively small quantities of adsorbedη^(1)-acetone,without observable quantities of enolate.Interestingly,acetate and formate signatures appear in the spectra of cubic,surfaceη^(1)-enolate containing,SrTiO_(3)upon illumination,while besides acetate and formate,the formation of(surface)formaldehyde was observed on truncated cubes,and dodecahedrons,by conversion of adsorbedη^(1)-acetone.Time-Resolved Photoluminescence studies demonstrate that the lifetimes of photogenerated charge carriers vary with crystal morphology.The shortest carrier lifetime(τ_(1)=33±0.1 ps)was observed in{110}-truncated cube SrTiO_(3),likely due to a relatively strong built-in electric field promoting electron transport to{100}facets and hole transport to{110}facets.The second lifetime(τ_(2)=259±1 ps)was also the shortest for this morphology,possibly due to a higher amount of surface trap states.Our results demonstrate that SrTiO_(3)crystal morphology can be tuned to optimize performance in photocatalytic oxidation. 展开更多
关键词 faceted SrTiO_(3) in situ DRIFTS PHOTOCATALYSIS TRPL VOC oxidation
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磷酸掺杂的聚苯并咪唑复合膜在高温质子交换膜燃料电池中的应用(英文) 被引量:2
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作者 何荣桓 李庆峰 Bjerrum Niels J 《应用化学》 CAS CSCD 北大核心 2006年第7期697-703,共7页
研制了聚苯并咪唑(PB I)的复合膜,复合膜中引入的组分包括无机质子导体磷酸氢锆(Zr(HPO4)2.nH2O,ZrP)和聚砜(PSF),以及磺化的酸型聚砜(SPSF(H))。热失重分析表明,复合膜PB I/ZrP/PSF和PB I/SPSF(H)的热稳定性可分别达400和230℃。磷酸... 研制了聚苯并咪唑(PB I)的复合膜,复合膜中引入的组分包括无机质子导体磷酸氢锆(Zr(HPO4)2.nH2O,ZrP)和聚砜(PSF),以及磺化的酸型聚砜(SPSF(H))。热失重分析表明,复合膜PB I/ZrP/PSF和PB I/SPSF(H)的热稳定性可分别达400和230℃。磷酸掺杂的PB I复合膜在温度高达200℃的低湿度条件下,呈现出高质子电导率。以磷酸掺杂的PB I复合膜为电解质,在200℃常压不加湿的条件下,以氢气氧气为燃料气进行了单电池测试,其最大功率密度分别为0.34 W/cm2(PB I/ZrP/PSF(质量比80∶15∶5))和0.38 W/cm2(PB I/SPSF(0.43H))。 展开更多
关键词 聚苯并咪唑 复合膜 电导率 质子交换膜 燃料电池
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Structural,phonon,elastic,thermodynamic and electronic properties of Mg-X(X=La,Nd,Sm)intermetallics:The first principles study 被引量:7
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作者 S.Rameshkumar G.Jaiganesh V.Jayalakshmi 《Journal of Magnesium and Alloys》 SCIE EI CAS 2019年第1期166-185,共20页
We show the results of first-principles calculations of structural,phonon,elastic,thermal and electronic properties of the Mg-X inter-metallics in their respective ground state phase and meta-stable phases at equilibr... We show the results of first-principles calculations of structural,phonon,elastic,thermal and electronic properties of the Mg-X inter-metallics in their respective ground state phase and meta-stable phases at equilibrium geometry and the studied pressure range.Phonon dispersion spectra for these compounds were investigated by using the linear response technique.The phonon spectra do not show any abnormality in their respective ground state phase.The respective ground states phases of the studied system remain stable within the studied pressure range.Electronic and thermodynamic properties were derived by analysis of the electronic structures and quasi-harmonic approximation.The mixed bonding character of the Mg-X intermetallics is revealed by Mg-X bonds,and it leads the metallic nature.Most of the contribution originated from X ions d like states at Fermi level compared to that of Mg ion in these intermetallics.In this work,we also predicted the melting temperature of these intermetallics and evaluated the Debye temperature by using elastic constants. 展开更多
关键词 Mg-X intermetallics First principle calculation Heat of formation Elastic constants Electronic and phonon properties Thermodynamic property
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The effect of melt flow induced by RMF on the meso-and micro-structure of unidirectionally solidified Al–7wt.%Si alloy Benchmark experiment under magnetic stirring 被引量:1
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作者 Zs.Veres A.Roósz +2 位作者 A.Rónaföldi A.Sycheva M.Svéda 《Journal of Materials Science & Technology》 SCIE EI CAS CSCD 2022年第8期197-208,共12页
During the last two decades,many algorithms were developed to simulate the solidification process for different casting methods like ingots,continuous casting of steel and the direct chill cast of aluminum.Experiments... During the last two decades,many algorithms were developed to simulate the solidification process for different casting methods like ingots,continuous casting of steel and the direct chill cast of aluminum.Experiments performed under exactly known conditions and with the detailed knowledge of meso-and micro-structures are required for validating these simulations.The aim of this paper is to give a data set to validate these simulations.Unidirectional solidification experiments were performed by using a rotating magnetic field(RMF)to study the effect of melt flow on the solidified micro-and meso-structure of the Al-7wt.%Si binary alloy.The first and the third 1/3 parts of samples were solidified without magnetic stirring,and the second(middle)1/3 part was solidified by using magnetic stirring.The magnetic induction was 10 m T,the temperature gradient was~7 K/mm,and the sample movement velocity was 0.1 mm/s.On the longitudinal section of the sample,the columnar/equiaxed transition(CET),the equiaxed/columnar transition(ECT),the secondary dendrite arm spacing(SDAS),and the macrosegregation(concentration distribution and the amount of eutectic)were investigated.The primary dendrite arm spacing(PDAS)and the grain structure were studied on the cross-section after color etching. 展开更多
关键词 Al–7wt.%Si alloy Unidirectional solidification RMF magnetic stirring Meso-and microstructure
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Mechanism of Methylene Blue adsorption on hybrid laponite-multi-walled carbon nanotube particles 被引量:2
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作者 Maryna Manilo Nikolai Lebovka Sandor Barany 《Journal of Environmental Sciences》 SCIE EI CAS CSCD 2016年第4期134-141,共8页
The kinetics of adsorption and parameters of equilibrium adsorption of Methylene Blue(MB)on hybrid laponite-multi-walled carbon nanotube(NT)particles in aqueous suspensions were determined.The laponite platelets w... The kinetics of adsorption and parameters of equilibrium adsorption of Methylene Blue(MB)on hybrid laponite-multi-walled carbon nanotube(NT)particles in aqueous suspensions were determined.The laponite platelets were used in order to facilitate disaggregation of NTs in aqueous suspensions and enhance the adsorption capacity of hybrid particles for MB.Experiments were performed at room temperature(298 K),and the laponite/NT ratio(Xl)was varied in the range of 0–0.5.For elucidation of the mechanism of MB adsorption on hybrid particles,the electrical conductivity of the system as well as the electrokinetic potential of laponite-NT hybrid particles were measured.Three different stages in the kinetics of adsorption of MB on the surface of NTs or hybrid laponite-NT particles were discovered to be a fast initial stage Ⅰ(adsorption time t=0–10 min),a slower intermediate stage Ⅱ(up to t=120 min)and a long-lasting final stage Ⅲ(up to t=24 hr).The presence of these stages was explained accounting for different types of interactions between MB and adsorbent particles,as well as for the changes in the structure of aggregates of NT particles and the long-range processes of restructuring of laponite platelets on the surface of NTs.The analysis of experimental data on specific surface area versus the value of Xl evidenced in favor of the model with linear contacts between rigid laponite platelets and NTs.It was also concluded that electrostatic interactions control the first stage of adsorption at low MB concentrations. 展开更多
关键词 Multi-walled carbon nanotubes Laponite platelets Methylene Blue Adsorption Kinetics Zeta potential
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Effect of Surface Roughness on Laser Induced Nonlinear Optical Properties of Annealed ZnO Thin Films
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作者 Vinay Kumari Vinod Kumar +3 位作者 Devendra Mohan Purnima B.P.Malik R.M.Mehra 《Journal of Materials Science & Technology》 SCIE EI CAS CSCD 2012年第6期506-511,共6页
Variation of nonlinear optical properties with surface roughness of ZnO thin films deposited on coming glass substrates at different annealing temperature (TA) was reported. The films were characterized by X-ray dif... Variation of nonlinear optical properties with surface roughness of ZnO thin films deposited on coming glass substrates at different annealing temperature (TA) was reported. The films were characterized by X-ray diffraction (XRD), UV-Vis-NIR transmission and single beam z-scan technique using second harmonics of Nd:YAG laser. Surface morphology of the samples was investigated by atomic force microscopy (AFM). Surface roughness was found minimum (8.4 nm) for ZnO sample annealed at 450℃. The nonlinear optical properties (NLO) were found to be dependent on surface roughness and the highest value of third order nonlinear susceptibility (X(3)=4.3x 10-7 esu) was obtained for ZnO at TA 450℃. 展开更多
关键词 ZnO films SOL-GEL Annealing temperature Nonlinear optical properties Thirdorder nonlinear susceptibility Z-SCAN
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Effect of the stoichiometry on the electronic structure of the Ni(111)/α-Al_2O_3(0001) interface:a first-principles investigation
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作者 施思齐 田中真悟 香山正憲 《Chinese Physics B》 SCIE EI CAS CSCD 2008年第7期2655-2661,共7页
In this paper first-principles calculations of Ni(111)/α-Al2O3(0001) interfaces have been performed, and are compared with the preceding results of the Cu (111)/α-Al2O3(0001) interface [2004 Phil. Mag. Left.... In this paper first-principles calculations of Ni(111)/α-Al2O3(0001) interfaces have been performed, and are compared with the preceding results of the Cu (111)/α-Al2O3(0001) interface [2004 Phil. Mag. Left. 84 425]. The AI- terminated and O-terminated interfaces have quite different adhesion mechanisms, which are similar to the Cu(111)/α Al2O3(0001) interface. For the O-terminated interface, the adhesion is caused by the strong O-2p/Ni-3d orbital hybridization and ionic interactions. On the other hand, the adhesion nature of the Al-terminated interface is the image-like electrostatic and Ni-Al hybridization interactions, the latter is substantial and cannot be neglected. Charge transfer occurs from Al2O3 to Ni, which is opposite to that in the O=terminated interface. The charge transfer direction for the Al-terminated and O-terminated Ni(111)/α-A1203(0001) interfaces is similar to that in the corresponding Cu(111)/α- Al2O3(0001) interface, but there exist the larger charge transfer quantity and consequent stronger adhesion nature, respectively. 展开更多
关键词 metal/ceramic interface STOICHIOMETRY electronic structure first-principles calculations
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Cassiterite U-Pb dating of the Yelonggou pegmatite-type lithium deposit in western Sichuan and its metallogenic age constraints
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作者 Xiang-yuan Yue Qian Zhang +4 位作者 Jun-jun Zhang Wei Zhang Jing Zhang Zhi-quan Jia Li-ping Luo 《China Geology》 CAS CSCD 2024年第1期153-156,共4页
1.Objective Pegmatite hosts important resource of rare metals,e.g.,lithium(Li)and beryllium(Be).In recent years,increasingly more studies were dedicated to characterize and unravel the formation of pegmatite-type depo... 1.Objective Pegmatite hosts important resource of rare metals,e.g.,lithium(Li)and beryllium(Be).In recent years,increasingly more studies were dedicated to characterize and unravel the formation of pegmatite-type deposits,for which accurate dating of pegmatite formation and mineralization is essential.The Songpan-Ganzi orogenic belt is a major rare metal metallogenic belt in China,hosting many important pegmatite-type Li deposits,including the Lijiagou,Dangba,Jiajika,Yelonggou,Cuola,and Declalongba.Radiometric age data(mica Ar-Ar and zircon/cassiterite U-Pb)from these Li deposits are sparse,ranging from 210 to 152 Ma.However,obtaining reliable zircon U-Pb dates can be a challenge due to the strong decidualization in pegmatites.As a result,the formation and mineralization ages of these rare metal pegmatites remain controversial,which hampers the development of pegmatite-type metallogenic model for the Songpan-Ganzi orogenic belt. 展开更多
关键词 DATING METALLOGENIC ZIRCON
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Substituted Molecular <i>p</i>-Dopants: A Theoretical Study
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作者 Asanga B. Padmaperuma 《Advances in Materials Physics and Chemistry》 2012年第3期163-172,共10页
Conductivity dopants with processing properties suitable for industrial applications are of importance to the organic electronics field. However, the number of commercially available organic molecular dopants is limit... Conductivity dopants with processing properties suitable for industrial applications are of importance to the organic electronics field. However, the number of commercially available organic molecular dopants is limited. The electron acceptor 2,3,5,6-tetrafluoro-7,7,8,8,-tetracyanoquinodimethane (F4-TCNQ) is the most utilized P-dopant;however, it has high volatility and a poor sticking coefficient, which makes it difficult to control doping levels and prevent vacuum system contamination. A design concept for P-type molecular dopants based on the TCNQ core which are substituted to improve processing properties without sacrificing the electronic properties necessary is presented. The correlation between the lowest unoccupied molecular orbital (LUMO) energy and the position of substitution as well as the choice of linker is evaluated. The position of substitution as well as the choice of linker has a significant effect on the electronic properties. However, the geometry of the substituted molecules was not significantly distorted from that of the parent F4-TCNQ, and the electron density was delocalized on the TCNQ core. We also put forward four possible molecular dopants with suitable energy levels. 展开更多
关键词 OLED MOLECULAR DOPANT F4-TCNQ Anchored DOPANTS
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Characteristics of Nanoparticles-Based Chemical Sensors
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作者 Jason Stephens A. K. Batra James R. Currie 《Materials Sciences and Applications》 2012年第7期448-452,共5页
Semiconducting nanoparticle tin oxide-based sensors have been prepared with a pressure load of 4, 6, 8, 10 tons and reinforced with carbon nanofibers (CNF) in SnO2 matrix. The SnO2/CNF sensor’s sensitivity for ethyl ... Semiconducting nanoparticle tin oxide-based sensors have been prepared with a pressure load of 4, 6, 8, 10 tons and reinforced with carbon nanofibers (CNF) in SnO2 matrix. The SnO2/CNF sensor’s sensitivity for ethyl alcohol has in-creased by a factor of two, in compared with that of pure SnO2 8-ton pressed sensor with lower response time. These results open the way towards further optimized lower cost CNF nanocomposite sensors as compared with expensive tin oxide/carbon nanotubes sensors. 展开更多
关键词 Chemical Sensors TIN OXIDE NANO-COMPOSITES CARBON NANOFIBER
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Effects of colored noise on the dynamics of quantum entanglement of a one-parameter qubit-qutrit system
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作者 Odette Melachio Tiokang Fridolin Nya Tchangnwa +2 位作者 Jaures Diffo Tchinda Arthur Tsamouo Tsokeng Martin Tchoffo 《Chinese Physics B》 SCIE EI CAS CSCD 2022年第5期141-149,共9页
We analyzed the effect of colored noise on the negativity dynamics of a hybrid system consisting of a qubit-qutrit and not interacting,prepared from the start in an entangled one-parameter state and acting with noise ... We analyzed the effect of colored noise on the negativity dynamics of a hybrid system consisting of a qubit-qutrit and not interacting,prepared from the start in an entangled one-parameter state and acting with noise in local and non-local environments.In this pink and brown noise we investigated two different situations:in the first situation,the noise is produced by a bistable oscillator with an unknown exchange rate;however,in the second situation,the noise is generated by a set of bistable oscillators.We found that entanglement decreases with time to zero,and undergoes the phenomenon of sudden death and rebirth.The pink noise is more prone to entanglement than the brown noise and the non-local environment is more prone to entanglement than the local one.When the number of fluctuators is increased,entanglement decays faster and finally,for certain parameters of the initial state,the subsystems are not affected by the noise. 展开更多
关键词 ENTANGLEMENT hybrid system QUTRIT colored noise
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Study of Radio over Fiber Transmission with a Single Line in Ring Topology for Deployment of MIMO Antenna Access Points in a Cell-less Network
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作者 Mamadou Sarr Dialo Diop +1 位作者 Ndolane Diouf Kharouna Talla 《Journal of Sensor Technology》 2023年第2期13-23,共11页
The massive growth of wireless traffic goes hand in hand with the deployment of advanced radio interfaces as well as network densification. This growth has a direct impact on the radio access architecture, which today... The massive growth of wireless traffic goes hand in hand with the deployment of advanced radio interfaces as well as network densification. This growth has a direct impact on the radio access architecture, which today is moving from centralized to distributed deployments through the use of a large number of access points (APs). This paper verifies the feasibility of deploying multiple APs in series on a single line in a ring topology in a cell-less network. On the one hand, this technique will further improve the communication capacity and flexibility of a Radio-over-Fiber (RoF) based mobile communication system and will reduce its construction cost. And on the other hand, this deployment topology is a solution to achieve a massive cell-free Multiple-Input Multiple-Output (MIMO) architecture and a cost-effective fronthaul solution. First, a passive optical add/drop multiplexer (OADM) is used to extract and add downlink and uplink signals from the remote access points of one kilometer. Then, a deployment model is developed with version 17 Optisystem software. The results obtained showed that the quadrature amplitude modulation (QAM) does not adapt to this multi-carrier transmission to deploy several AP in series on a single line. Thus, the performance degradation increases when the number of APs integrated on the line increases. 展开更多
关键词 ROF Ring Topology MIMO Antennas Cell-less Network
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Effects of classical random external field on the dynamics of entanglement in a four-qubit system
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作者 Edwige Carole Fosso Fridolin Tchangnwa Nya +1 位作者 Lionel Tenemeza Kenfack Martin Tchoffo 《Chinese Physics B》 SCIE EI CAS CSCD 2021年第11期240-252,共13页
We investigate the dynamics of entanglement through negativity and witness operators in a system of four noninteracting qubits driven by a classical phase noisy laser characterized by a classical random external field... We investigate the dynamics of entanglement through negativity and witness operators in a system of four noninteracting qubits driven by a classical phase noisy laser characterized by a classical random external field(CREF).The qubits are initially prepared in the GHZ-type and W-type states and interact with the CREF in two different qubit-field configurations,namely,common environment and independent environments in which the cases of equal and different field phase probabilities are distinguished.We find that entanglement exhibits different decaying behavior,depending on the input states of the qubits,the qubit-field coupling configuration,and field phase probabilities.On the one hand,we demonstrate that the coupling of the qubits in a common environment is an alternative and more efficient strategy to completely shield the system from the detrimental impacts of the decoherence process induced by a CREF,independent of the input state and the field phase probabilities considered.Also,we show that GHZ-type states have strong dynamics under CREF as compared to W-type states.On the other hand,we demonstrate that in the model investigated the system robustness’s can be greatly improved by increasing the number of qubits constituting the system. 展开更多
关键词 ENTANGLEMENT qubit and classical random external field
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Proton Exchange Membranes for Fuel Cells Challenges and Recent Developments
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作者 Jens Oluf Jensen Pernille P. Noyé Niels J. Bjerrum 《复旦学报(自然科学版)》 CAS CSCD 北大核心 2005年第5期666-667,共2页
关键词 质子交换 燃料电池 隔膜 电化学 电解液
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Response of Photonic Hydrogels of Homogeneous Particles to Uranyl Ions in Aqueous Solutions
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作者 R.G.JOSHI Deepak K.GUPTA +2 位作者 P.AMESH P.K.PARIDA T.R.RAVINDRAN 《Photonic Sensors》 SCIE EI CSCD 2023年第4期50-61,共12页
We study here the response of photonic hydrogels(PHs),made of photonic crystals of homogeneous silica particles in polyacrylamide hydrogels(SPHs),to the uranyl ions 22 UO_(2)^(2+) in aqueous solutions.It is found that... We study here the response of photonic hydrogels(PHs),made of photonic crystals of homogeneous silica particles in polyacrylamide hydrogels(SPHs),to the uranyl ions 22 UO_(2)^(2+) in aqueous solutions.It is found that the reflection spectra of the SPH show a peak due to the Bragg diffraction,which exhibits a blue shift in the presence of 22 UO_(2)^(2+).Upon exposure to the SPH,22 UO_(2)^(2+)gets adsorbed on the SPH and forms complex coordinate bonds with multiple ligands on the SPH,which causes shrinking of hydrogel and leads to the blue shift in the diffraction peak.The amount of the blue shift in the diffraction peak increases monotonically up to 22 UO_(2)^(2+)concentrations as high as 2300μM.The equilibration time for the shift in the Bragg peak upon exposure to 22 UO_(2)^(2+)is found to be~30 min.These results are in contrast to the earlier reports on photonic hydrogels of inhomogeneous microgel particles hydrogel(MPH),which shows the threshold 22 UO_(2)^(2+)concentration of~600μM,below which the diffraction peak exhibits a blue shift and a change to a red shift above it.The equilibration time for MPH is~300 min.The observed monotonic blue shift and the faster time response of the SPH to 22 UO_(2)^(2+)as compared to the MPH are explained in terms of homogeneous nature of silica particles in the SPH,against the porous and polymeric nature of microgels in the MPH.We also study the extraction of 22 UO_(2)^(2+)from aqueous solutions using the SPH.The extraction capacity estimated by the arsenazo-III analysis is found to be 112 mM/kg. 展开更多
关键词 Photonic hydrogels uranium extraction and monitoring arsenazo-Ⅲ-uranium complex polyacrylamide hydrogel UV-visible spectroscopy
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Wafer-scale 3D shaping of high aspect ratio structures by multistep plasma etching and corner lithography
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作者 Shu Ni Erwin J.W.Berenschot +5 位作者 Pieter J.Westerik Meint Jde Boer Rene Wolf Hai Le-The Han J.G.E.Gardeniers Niels R.Tas 《Microsystems & Nanoengineering》 EI CSCD 2020年第1期1176-1186,共11页
The current progress of system miniaturization relies extensively on the development of 3D machining techniques to increase the areal structure density.In this work,a wafer-scale out-of-plane 3D silicon(Si)shaping tec... The current progress of system miniaturization relies extensively on the development of 3D machining techniques to increase the areal structure density.In this work,a wafer-scale out-of-plane 3D silicon(Si)shaping technology is reported,which combines a multistep plasma etching process with corner lithography.The multistep plasma etching procedure results in high aspect ratio structures with stacked semicircles etched deep into the sidewall and thereby introduces corners with a proper geometry for the subsequent corner lithography.Due to the geometrical contrast between the gaps and sidewall,residues are left only inside the gaps and form an inversion mask inside the semicircles.Using this mask,octahedra and donuts can be etched in a repeated manner into Si over the full wafer area,which demonstrates the potential of this technology for constructing high-density 3D structures with good dimensional control in the bulk of Si wafers. 展开更多
关键词 LITHOGRAPHY high STRUCTURES
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